Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment

Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe

Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...

2D PIC Simulation of the DC Discharge in Cylindrical Magnetron

PIC method of plasma simulation is widely used in plasma physics research because of its ability to solve wide range of problems in kinetic approach. Regarding to description of PIC method we refer to [Birdsall et al., 1995]. This work is focused on PIC simulations of dc discharge in cylindrical magnetron device. Magnetrons are used in industry e.g. for thin film layer coating and etching. Many...

influence of o2 and n2 concentrations on the characteristics of plasma in dc cylindrical magnetron discharge by langmuir probe

0

Unbalanced Cylindrical Magnetron for Accelerating Cavities Coating

Experimental investigation of plasma-immersion ion implantation treatment for biocompatible polyurethane implants production

Modification of the surface layer of polyurethane with plasma-immersion ion implantation (PIII) and studying its physical and chemical changes have been discussed in this paper. The goal of the research was to obtain carbonized layer allowing creating biocompatible polyurethane implants. The experiments of PIII treatment in various modes were performed. The investigation of the modified surface...